High Voltage SMU

Features

• 1 channel, U/I measurement unit
• Output voltages up to 2.5 kV (<30 mA in pulse mode)
• Resolution current measurement <1 pA
• Adjustable slew rate from 10 V/ms to 1,000 V/ms
• Standard: 19″ 6 U

Applications

• Leakage current measurement for semiconductors, components or cables
• Measurement of breakdown voltage in semiconductors
• Test voltage generation >100 V

Source and Measurement Units (SMUs) are devices that generate voltages or currents and can measure them simultaneously using the integrated measuring units (VMU, CMU).
High-voltage SMUs work as a regulated voltage source and are able to generate very high output voltages.

The high-voltage SMUs of the AXV family can output regulated DC voltages or voltage pulses in the range from -1,500 to +2,500 V. The signal curve is very linear and is characterized by very short rise and fall times. The extremely fast regulation prevents the output signal from overshooting, which enormously shortens test times.

With the integrated measurement units for current and voltage, current and voltage can also be measured on the device while testing during a pulse.

Due to the high resolution of the current measurement in the pA range, in connection with the active guarding outputs (avoidance of leakage currents in the cabling), the device is ideally suited for the measurement of leakage currents.