The AXV7680 provides five current ranges and is able to generate currents down to the nA range. In conjunction with the integrated Voltage Measurement Unit (VMU) all requirements of high voltage semiconductor testing can be met. The integrated guard amplifier can be used to drive the cable shielding and reduce the leakage current in the DUT cabling. The integrated Current Measurement Unit (CMU) is extremely fast and is equipped with seven measurement ranges. This allows current measurement down to the pA range. With parallel trigger signals VMU and CMU can do synchronous measurements. In the integrated relay matrix all high voltage signals (FORCE, SENSE, GUARD) are connected via relays to the output. Additional relays and switchable resistors provide self test capabilities.